The Kinetics of Dopant-Enhanced Solid Phase Epitaxy in H-Free Amorphous Silicon Layers

Citation

McCallum, J 1999, 'The Kinetics of Dopant-Enhanced Solid Phase Epitaxy in H-Free Amorphous Silicon Layers', Nuclear Instruments and Methods in Physics Research: Section B, vol. B148, pp. 350-354.

Year

1999

ANU Authors

Field of Research

  • Soft Condensed Matter

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