The Kinetics of Dopant-Enhanced Solid Phase Epitaxy in H-Free Amorphous Silicon Layers
Citation
McCallum, J 1999, 'The Kinetics of Dopant-Enhanced Solid Phase Epitaxy in H-Free Amorphous Silicon Layers', Nuclear Instruments and Methods in Physics Research: Section B, vol. B148, pp. 350-354.Year
1999ANU Authors
Field of Research
- Soft Condensed Matter