Discharge kinetics of inductively coupled oxygen plasmas: experiment and model

Citation

Corr, C, Gomez, S & Graham, W 2012, 'Discharge kinetics of inductively coupled oxygen plasmas: experiment and model', Plasma Sources Science and Technology, vol. 21, no. 5, pp. 055024/1-13.

Year

2012

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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