Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms
Citation
Lafleur, T, Boswell, R & Booth, J 2012, 'Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms', Applied Physics Letters, vol. 100, no. 19, pp. 194101/1-4.Year
2012ANU Authors
Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges