Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

Citation

Lafleur, T, Boswell, R & Booth, J 2012, 'Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms', Applied Physics Letters, vol. 100, no. 19, pp. 194101/1-4.

Year

2012

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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