Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors

Citation

KUHNE, S., GRAF, M., TRICOLI, A., MAYER, F., PRATSINIS, S. E. & HIERLEMANN, A. 2008. Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors. Journal of Micromechanics and Microengineering, 18, 035040.

Year

2008

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