Low temperature growth of nanocrystalline TiO2 films with Ar/O2 low-field helicon plasma

Citation

Sarra-Bournet, C, Charles, C & Boswell, R 2011, 'Low temperature growth of nanocrystalline TiO2 films with Ar/O2 low-field helicon plasma', Surface and Coatings Technology, vol. 205, no. 15, pp. 3939-3946.

Year

2011

ANU Authors

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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