Low temperature growth of nanocrystalline TiO2 films with Ar/O2 low-field helicon plasma
Citation
Sarra-Bournet, C, Charles, C & Boswell, R 2011, 'Low temperature growth of nanocrystalline TiO2 films with Ar/O2 low-field helicon plasma', Surface and Coatings Technology, vol. 205, no. 15, pp. 3939-3946.Year
2011Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges