Effect of deposition conditions and thermal annealing on the charge trapping properties of SiNx films

Citation

Ren, Y, Weber, K & Nursam, N et al 2010, 'Effect of deposition conditions and thermal annealing on the charge trapping properties of SiNx films', Applied Physics Letters, vol. 97, no. 20, pp. 202907/1-3.

Year

2010

ANU Authors

Field of Research

  • Compound Semiconductors

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