Effect of deposition conditions and thermal annealing on the charge trapping properties of SiNx films
Citation
Ren, Y, Weber, K & Nursam, N et al 2010, 'Effect of deposition conditions and thermal annealing on the charge trapping properties of SiNx films', Applied Physics Letters, vol. 97, no. 20, pp. 202907/1-3.Year
2010ANU Authors
Field of Research
- Compound Semiconductors