Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to the growth dynamics
Citation
Corr, C, Boswell, R & Carman, R 2011, 'Gas phase optical emission spectroscopy during remote plasma chemical vapour deposition of GaN and relation to the growth dynamics', Journal of Physics D: Applied Physics, vol. 44, no. 4, pp. 045201 (8).Year
2011Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges
