Preparation of a 10 nm thick single-crystal silicon membrane self-supporting over a diameter of 1 mm

Citation

Utteridge, S, Sashin, V, Canney, S et al 2000, 'Preparation of a 10 nm thick single-crystal silicon membrane self-supporting over a diameter of 1 mm', Applied Surface Science, vol. 162, pp. 359-367.

Year

2000

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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