Formation of plasma induced surface damage in silica glass etching for optical waveguides

Citation

Choi, D, Lee, J, Kim, D et al 2004, 'Formation of plasma induced surface damage in silica glass etching for optical waveguides', Journal of Applied Physics, vol. 95, no. 12, pp. 8400 - 8407.

Year

2004

Field of Research

  • Photonics, Optoelectronics And Optical Communications

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