High index contrast polysiloxane waveguides fabricated by dry etching

Citation

Madden, S, Zhang, Y, Choi, D et al 2009, 'High index contrast polysiloxane waveguides fabricated by dry etching', Journal of Vacuum Science and Technology A, vol. 27, no. 3, pp. 561 - 565.

Year

2009

Field of Research

  • Photonics And Electro Optical Engineering (Excl. Communications)

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