Nano-phase separation of Arsenic Tri-sulphide (As2S3) film and its effect on Plasma Etching

Citation

Choi, D, Madden, S, Wang, R et al 2007, 'Nano-phase separation of Arsenic Tri-sulphide (As2S3) film and its effect on Plasma Etching', Journal of Non-crystalline Solids, vol. 353, pp. 953-955.

Year

2007

Fields of Research

  • Ceramics
  • Nanotechnology Not Elsewhere Classified
  • Surfaces And Structural Properties Of Condensed Matter

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