Surface oxidation of Al masks for deep dry-etch of silica optical waveguides

Citation

Li, W, Bulla, D & Boswell, R 2007, 'Surface oxidation of Al masks for deep dry-etch of silica optical waveguides', Surface and Coatings Technology, vol. 201, no. 9 - 11, pp. 4979-4983.

Year

2007

ANU Authors

Field of Research

  • Materials Engineering Not Elsewhere Classified

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