The formation, migration, agglomeration and annealing of vacancy-type defects in self-implanted Si
Citation
Coleman, P, Harding, R, Davies, G et al. 2007, 'The formation, migration, agglomeration and annealing of vacancy-type defects in self-implanted Si', Journal of Materials Science, vol. 18, pp. 695-700.Year
2007ANU Authors
Fields of Research
- Soft Condensed Matter
- Materials Engineering Not Elsewhere Classified
- Electrical And Electronic Engineering Not Elsewhere Classified