The formation, migration, agglomeration and annealing of vacancy-type defects in self-implanted Si

Citation

Coleman, P, Harding, R, Davies, G et al. 2007, 'The formation, migration, agglomeration and annealing of vacancy-type defects in self-implanted Si', Journal of Materials Science, vol. 18, pp. 695-700.

Year

2007

Fields of Research

  • Soft Condensed Matter
  • Materials Engineering Not Elsewhere Classified
  • Electrical And Electronic Engineering Not Elsewhere Classified

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