Comparison of plasma NH3 and atomic H effects to Si-SiO2 interface

Citation

Jin, H, Weber, K, Blakers, A et al 2006, 'Comparison of plasma NH3 and atomic H effects to Si-SiO2 interface', International Conference on New Energy Materials, Academic Press, not provided.

Year

2006

Fields of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified
  • Materials Engineering Not Elsewhere Classified

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