Comparison of the thermal stabilityof thermally grown silicon dioxide on silicon before and after LPCVD deposition

Citation

Jin, H, Zellweger, H, Weber, K et al 2006, 'Comparison of the thermal stabilityof thermally grown silicon dioxide on silicon before and after LPCVD deposition', Australia and New Zealand Solar Energy Society Conference (Solar 2006), ed. Conference Program Committee, Australian and New Zealand Solar Energy Society (ANZSES), Canberra Australia, p. 5.

Year

2006

Fields of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified
  • Materials Engineering Not Elsewhere Classified

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