Characterization of low pressure chemical vapour deposited Si3N4 films

Citation

Jin, H, Weber, K & Blakers, A 2006, 'Characterization of low pressure chemical vapour deposited Si3N4 films', Australia and New Zealand Solar Energy Society Conference (Solar 2006), ed. Conference Program Committee, Australian and New Zealand Solar Energy Society (ANZSES), Canberra Australia, pp. 1-5.

Year

2006

ANU Authors

Fields of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified
  • Materials Engineering Not Elsewhere Classified

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