The effect of LPCVD silicon nitride deposition on the Si-SiO2 interface of oxidised silicon wafers

Citation

Jin, H & Weber, K 2007, 'The effect of LPCVD silicon nitride deposition on the Si-SiO2 interface of oxidised silicon wafers', Journal of the Electrochemical Society, vol. 154, no. 1-4, pp. H5-H8.

Year

2007

ANU Authors

Field of Research

  • Materials Engineering Not Elsewhere Classified

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