FTIR analysis of microwave-excited PECVD silicon nitride layers
Citation
Cuevas, A, Chen, F, Tan, J et al. 2006, 'FTIR analysis of microwave-excited PECVD silicon nitride layers', World Conference on Photovoltaic Energy Conversion 2006, ed. Conference Program Committee, OmniPress, Waikoloa Hawaii, p. 114801151.Year
2006ANU Authors
Fields of Research
- Electrical And Electronic Engineering Not Elsewhere Classified
- Materials Engineering Not Elsewhere Classified
