Defect generation at the Si-SiO2 interface following corona charging

Citation

Jin, H, Weber, K, Dang, N et al. 2007, 'Defect generation at the Si-SiO2 interface following corona charging', Applied Physics Letters, vol. 90, no. 26, pp. 262109 1-3.

Year

2007

Fields of Research

  • Manufacturing Engineering Not Elsewhere Classified
  • Materials Engineering Not Elsewhere Classified

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