Defect generation at the Si-SiO2 interface following corona charging
Citation
Jin, H, Weber, K, Dang, N et al. 2007, 'Defect generation at the Si-SiO2 interface following corona charging', Applied Physics Letters, vol. 90, no. 26, pp. 262109 1-3.Year
2007ANU Authors
Fields of Research
- Manufacturing Engineering Not Elsewhere Classified
- Materials Engineering Not Elsewhere Classified