Magnetic hexapole lens focu... - Researchers

Magnetic hexapole lens focusing of a metastable helium atomic beam for UV-free lithography

Citation

Chaustowski, R, Leung, V & Baldwin, K 2007, 'Magnetic hexapole lens focusing of a metastable helium atomic beam for UV-free lithography', Applied Physics B: Lasers and Optics, vol. 86, pp. 491-496.

Year

2007

ANU Authors

Professor Ken Baldwin

Field of Research

Atomic And Molecular Physics

Updated: 31 March 2023 / Responsible Officer: Director (Research Services Division) / Page Contact: Researchers