Magnetic hexapole lens focusing of a metastable helium atomic beam for UV-free lithography

Citation

Chaustowski, R, Leung, V & Baldwin, K 2007, 'Magnetic hexapole lens focusing of a metastable helium atomic beam for UV-free lithography', Applied Physics B: Lasers and Optics, vol. 86, pp. 491-496.

Year

2007

Field of Research

  • Atomic And Molecular Physics

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