Magnetic hexapole lens focusing of a metastable helium atomic beam for UV-free lithography
Citation
Chaustowski, R, Leung, V & Baldwin, K 2007, 'Magnetic hexapole lens focusing of a metastable helium atomic beam for UV-free lithography', Applied Physics B: Lasers and Optics, vol. 86, pp. 491-496.Year
2007ANU Authors
Field of Research
- Atomic And Molecular Physics