Fabrication of Schottky Barrier MOSFETs on SOI by a Self-Assembly CoSi2-Patterning Method

Citation

Zhao, Q, Kluth, P, Winnerl, S et al 2003, 'Fabrication of Schottky Barrier MOSFETs on SOI by a Self-Assembly CoSi2-Patterning Method', Solid-State Electronics, vol. 47, pp. 1183-1186.

Year

2003

Field of Research

  • Antennas And Propagation

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