Epitaxial CoSi2-Nanostructures: An approach to silicon nanoelectronics
Citation
Kluth, P, Zhao, Q, Winnerl, S et al 2002, 'Epitaxial CoSi2-Nanostructures: An approach to silicon nanoelectronics', Microelectronic Engineering, vol. 64, pp. 163-171.Year
2002ANU Authors
Field of Research
- Nanotechnology Not Elsewhere Classified