Epitaxial CoSi2-Nanostructures: An approach to silicon nanoelectronics

Citation

Kluth, P, Zhao, Q, Winnerl, S et al 2002, 'Epitaxial CoSi2-Nanostructures: An approach to silicon nanoelectronics', Microelectronic Engineering, vol. 64, pp. 163-171.

Year

2002

Field of Research

  • Nanotechnology Not Elsewhere Classified

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