High brightness inductively coupled plasma source for high current focused ion beam applications

Citation

Smith, N, Skoczylas, W, Kellogg, S et al 2006, 'High brightness inductively coupled plasma source for high current focused ion beam applications', Journal of Vacuum Science and Technology B, vol. 24, no. 6, pp. 2902-2906.

Year

2006

ANU Authors

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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