Self-Assembly Patterning of Epitaxial CoSi2 Nano-Structures

Citation

Zhao, Q, Kluth, P, Winnerl, S et al 2002, 'Self-Assembly Patterning of Epitaxial CoSi2 Nano-Structures', Microelectronic Engineering, vol. 64, pp. 443-447.

Year

2002

Field of Research

  • Renewable Power And Energy Systems Engineering (Excl. Solar Cells)

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