Self-Assembly Patterning of Epitaxial CoSi2 Nano-Structures
Citation
Zhao, Q, Kluth, P, Winnerl, S et al 2002, 'Self-Assembly Patterning of Epitaxial CoSi2 Nano-Structures', Microelectronic Engineering, vol. 64, pp. 443-447.Year
2002ANU Authors
Field of Research
- Renewable Power And Energy Systems Engineering (Excl. Solar Cells)