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Nanopatterning of Epitaxial CoSi2 using Oxidation in a Local Stress Field and Fabrication of Nanometer Metal-Oxide-Seminconductor Field-Effect Transistors

Citation

Zhao, Q, Kluth, P, Bay, H et al 2004, 'Nanopatterning of Epitaxial CoSi2 using Oxidation in a Local Stress Field and Fabrication of Nanometer Metal-Oxide-Seminconductor Field-Effect Transistors', Journal of Applied Physics, vol. 96, no. 10, pp. 5775-5780.

Year

2004

Field of Research

  • Renewable Power And Energy Systems Engineering (Excl. Solar Cells)

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