A Comparison of Extended Defect Formation Induced by Ion Implantation in (0001) and (1120)4H-SiC

Citation

Wong Leung, Y, Linnarsson, M & Svensson, B 2003, 'A Comparison of Extended Defect Formation Induced by Ion Implantation in (0001) and (1120)4H-SiC', Physica B, vol. 340-342, pp. 132-136.

Year

2003

ANU Authors

Field of Research

  • Materials Engineering Not Elsewhere Classified

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