Gettering of Copper to Hydrogen-induced Cavities in Multicrystalline Silicon

Citation

Kinomura, A, Horino, Y, Nakano, Y et al 2005, 'Gettering of Copper to Hydrogen-induced Cavities in Multicrystalline Silicon', Journal of Applied Physics, vol. 98, no. 6, pp. 066102-1-3.

Year

2005

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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