The Role of Oxygen on the Stability of Gettering of Metals to Cavities in Silicon

Citation

Williams, J, Conway, M, Wong Leung, Y et al. 1999, 'The Role of Oxygen on the Stability of Gettering of Metals to Cavities in Silicon', Applied Physics Letters, vol. 75, no. 16, pp. 2424-2426.

Year

1999

ANU Authors

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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