Etching Silicon by SF6 in a Continuous and Pulsed Power Helicon Reactor

Citation

Herrick, A, Perry, A & Boswell, R 2003, 'Etching Silicon by SF6 in a Continuous and Pulsed Power Helicon Reactor', Journal of Vacuum Science and Technology A, vol. 21, no. 4, pp. 955-966.

Year

2003

ANU Authors

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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