Low Temperature Pulsed Etching of Large Glass Substrates

Citation

Dubost, L, Belinger, A, Perrin, J et al 2003, 'Low Temperature Pulsed Etching of Large Glass Substrates', Journal of Vacuum Science and Technology A, vol. 21, no. 4, pp. 892-894.

Year

2003

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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