Low Temperature Pulsed Etching of Large Glass Substrates

Citation

Dubost, L, Belinger, A, Perrin, J et al 2003, 'Low Temperature Pulsed Etching of Large Glass Substrates', Journal of Vacuum Science and Technology A, vol. 21, no. 4, pp. 892-894.

Year

2003

ANU Authors

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

Updated:  05 July 2024 / Responsible Officer:  Director (Research Services Division) / Page Contact:  Researchers