Surface passivation of silicon solar cells using plasma-enhanced chemical-vapour-deposited SiN films and thin thermal SiO2/plasma SiN stacks

Citation

Schmidt, J, Kerr, M & Cuevas, A 2001, 'Surface passivation of silicon solar cells using plasma-enhanced chemical-vapour-deposited SiN films and thin thermal SiO2/plasma SiN stacks', Semiconductor Science and Technology, vol. 16, pp. 164-170.

Year

2001

ANU Authors

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

Updated:  28 March 2024 / Responsible Officer:  Director (Research Services Division) / Page Contact:  Researchers