Selectivity of Nanocavities and Dislocations for Gettering of Cu and Fe in Silicon
Citation
Stritzker, B, Petravic, M, Wong Leung, Y et al. 2001, 'Selectivity of Nanocavities and Dislocations for Gettering of Cu and Fe in Silicon', Applied Physics Letters, vol. 78, no. 18, pp. 2682-2684.Year
2001Field of Research
- Electrical And Electronic Engineering Not Elsewhere Classified
