Selectivity of Nanocavities and Dislocations for Gettering of Cu and Fe in Silicon

Citation

Stritzker, B, Petravic, M, Wong Leung, Y et al 2001, 'Selectivity of Nanocavities and Dislocations for Gettering of Cu and Fe in Silicon', Applied Physics Letters, vol. 78, no. 18, pp. 2682-2684.

Year

2001

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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