Damage studies in dry etched textured silicon surfaces

Citation

Kumaravelu, G, Alkaisi, M, Bittar, A et al 2004, 'Damage studies in dry etched textured silicon surfaces', Current Applied Physics, vol. 4, no. 2-4, pp. 108-110.

Year

2004

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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