Industrial PECVD silicon nitride: surface and bulk passivation of silicon wafers
Citation
Winderbaum, S, Cuevas, A, Chen, F et al 2004, 'Industrial PECVD silicon nitride: surface and bulk passivation of silicon wafers', European Photovoltaic Solar Energy Conference 2004, ed. W Hoffmann, J-L Bal, H Ossenbrink, W Palz, P Helm, WIP Munich and ETA-Florence, Florence, pp. 576-579.
Year
2004
Fields of Research
- Chemical Engineering Not Elsewhere Classified
- Electrical And Electronic Engineering Not Elsewhere Classified