Industrial PECVD silicon nitride: surface and bulk passivation of silicon wafers

Citation

Winderbaum, S, Cuevas, A, Chen, F et al 2004, 'Industrial PECVD silicon nitride: surface and bulk passivation of silicon wafers', European Photovoltaic Solar Energy Conference 2004, ed. W Hoffmann, J-L Bal, H Ossenbrink, W Palz, P Helm, WIP Munich and ETA-Florence, Florence, pp. 576-579.

Year

2004

Fields of Research

  • Chemical Engineering Not Elsewhere Classified
  • Electrical And Electronic Engineering Not Elsewhere Classified

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