Onset of implant-related recombination in self-ion implanted and annealed crystalline silicon

Citation

MacDonald, D, Deenapanray, P & Diez, S 2004, 'Onset of implant-related recombination in self-ion implanted and annealed crystalline silicon', Journal of Applied Physics, vol. 96, no. 7, pp. 3687-3691.

Year

2004

ANU Authors

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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