A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface

Citation

Jin, H, Weber, K & Blakers, A 2005, 'A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface', International Photovoltaic Science and Engineering Conference (PVSEC 2005), ed. Cui Rongqiang, Chen Tingjin, Li Guoxin, Sun Tietun, Shanghai Scientific & Technological Literature Publishing House, Shanghai, pp. 301-302.

Year

2005

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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