The effect of phase difference between powered electrodes on RF plasmas

Citation

Proschek, M, Yin, Y, Charles, C et al 2005, 'The effect of phase difference between powered electrodes on RF plasmas', Plasma Sources Science and Technology, vol. 14, pp. 407-411.

Year

2005

ANU Authors

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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