Micro-arcing instability in RF PECVD plasma system
Citation
Yin, Y, Bilek, M, McKenzie, D et al 2005, 'Micro-arcing instability in RF PECVD plasma system', Surface and Coatings Technology, vol. 198, pp. 379-383.Year
2005Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges
