Real-Time Drift Correction of a Focused Ion Beam Milling System

Citation

Freeman, D, Luther-Davies, B & Madden, S 2006, 'Real-Time Drift Correction of a Focused Ion Beam Milling System', Nano Sciences and Technology Institute Conference and Trade Show 2006, ed. Nano Sciences and Technology Institute, Nano Science and Technology Institute, Cambridge, MA, USA.

Year

2006

Field of Research

  • Complex Physical Systems

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