Patterning of inorganic polymer glass waveguiding films by dry etching
Citation
Madden, S, Zhang, Y, Luther-Davies, B et al. 2008, 'Patterning of inorganic polymer glass waveguiding films by dry etching', Proceedings of SPIE - Progress in Biomedical Optics and Imaging, vol. 6801, no. 680107-1.Year
2008Field of Research
- Polymers And Plastics
