Patterning of inorganic polymer glass waveguiding films by dry etching

Citation

Madden, S, Zhang, Y, Luther-Davies, B et al. 2008, 'Patterning of inorganic polymer glass waveguiding films by dry etching', Proceedings of SPIE - Progress in Biomedical Optics and Imaging, vol. 6801, no. 680107-1.

Year

2008

Field of Research

  • Polymers And Plastics

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