Particle-in-cell Simulation of an Electron Shock Wave in a Rapid Rise Time Plasma Immersion Ion Implantation Process

Citation

Meige, A, Jarnyk, M, Kwok, D et al 2005, 'Particle-in-cell Simulation of an Electron Shock Wave in a Rapid Rise Time Plasma Immersion Ion Implantation Process', Physics of Plasmas, vol. 12, no. 4, pp. 043503-1-4.

Year

2005

Field of Research

  • Plasma Physics; Fusion Plasmas; Electrical Discharges

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