Particle-in-cell Simulation of an Electron Shock Wave in a Rapid Rise Time Plasma Immersion Ion Implantation Process
Citation
Meige, A, Jarnyk, M, Kwok, D et al 2005, 'Particle-in-cell Simulation of an Electron Shock Wave in a Rapid Rise Time Plasma Immersion Ion Implantation Process', Physics of Plasmas, vol. 12, no. 4, pp. 043503-1-4.Year
2005ANU Authors
Field of Research
- Plasma Physics; Fusion Plasmas; Electrical Discharges
