Variation of ion-irradiation induced strain as a function of ion fluence in Si

Citation

Lakshmanasamy, R, Hatt, S, Kluth, P et al. 2007, 'Variation of ion-irradiation induced strain as a function of ion fluence in Si', Nuclear Instruments and Methods in Physics Research: Section B, vol. 257, pp. 236-239.

Year

2007

Field of Research

  • Nanotechnology Not Elsewhere Classified

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