Silicon/silicon oxide/LPCVD silicon nitride stacks: the effect of oxide thicknoww on bulk damage and surface passivation

Citation

Jin, H, Weber, K & Blakers, A 2005, 'Silicon/silicon oxide/LPCVD silicon nitride stacks: the effect of oxide thicknoww on bulk damage and surface passivation', European Photovoltaic Solar Energy Conference 2005, ed. W Palz, H Ossenbrink, P Helm, WIP-Renewable Energies, Munich, Germany, pp. 230-232.

Year

2005

Field of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified

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