Elastic Cross Sections for Electron Collisions with Molecules Relevant to Plasma Processing

Citation

Yoon, J, Song, M, Kato, H et al 2010, 'Elastic Cross Sections for Electron Collisions with Molecules Relevant to Plasma Processing', Journal of Physical and Chemical Reference Data, vol. 39, no. 3, p. 24.

Year

2010

ANU Authors

Field of Research

  • Atomic And Molecular Physics

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