The effect of exposure of Si-Si02 structure to atomic H by PECVD reactor

Citation

Zhang, C, Weber, K, Jin, H et al. 2009, 'The effect of exposure of Si-Si02 structure to atomic H by PECVD reactor', IEEE Photovoltaic Specialists Conference (PVSC 2009), Institute of Electrical and Electronics Engineers (IEEE Inc), Piscataway USA, pp. 000164-000168.

Year

2009

ANU Authors

Field of Research

  • Renewable Power And Energy Systems Engineering (Excl. Solar Cells)

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