Passivation of LPCVD nitride silicon stacks by atomic H
Citation
Jin, H, Weber, K & Blakers, A 2006, 'Passivation of LPCVD nitride silicon stacks by atomic H', World Conference on Photovoltaic Energy Conversion 2006, ed. Conference Program Committee, OmniPress, Waikoloa Hawaii, pp. 1-4.Year
2006Fields of Research
- Electrical And Electronic Engineering Not Elsewhere Classified
- Materials Engineering Not Elsewhere Classified
