Plasma ammonia passivation ... - Researchers

Plasma ammonia passivation of SiN/SiO2/Si stacks

Citation

Jin, H, Weber, K & Blakers, A 2006, 'Plasma ammonia passivation of SiN/SiO2/Si stacks', International Conference on New Energy Materials, Academic Press, not provided.

Year

2006

ANU Authors

Dr Hao Jin
Professor Klaus Weber
Emeritus Professor Andrew Blakers

Field of Research

Materials Engineering Not Elsewhere Classified

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