Defect generation concomitant with plasma nitridation to Si/SiO2 stacks at room temperature

Citation

Jin, H, Weber, K, Smith, P et al 2006, 'Defect generation concomitant with plasma nitridation to Si/SiO2 stacks at room temperature', Australia and New Zealand Solar Energy Society Conference (Solar 2006), ed. Conference Program Committee, Australian and New Zealand Solar Energy Society (ANZSES), Canberra Australia.

Year

2006

Fields of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified
  • Materials Engineering Not Elsewhere Classified

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