Defect generation at SiO2/Si interfaces by low pressure chemical vapor deposition of silicon nitride

Citation

Jin, H, Weber, K & Smith, P 2006, 'Defect generation at SiO2/Si interfaces by low pressure chemical vapor deposition of silicon nitride', Applied Physics Letters, vol. 89, no. 9, pp. 092120-1 - 092120-3.

Year

2006

Fields of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified
  • Materials Engineering Not Elsewhere Classified

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