Defect generation at SiO2/Si interfaces by low pressure chemical vapor deposition of silicon nitride
Citation
Jin, H, Weber, K & Smith, P 2006, 'Defect generation at SiO2/Si interfaces by low pressure chemical vapor deposition of silicon nitride', Applied Physics Letters, vol. 89, no. 9, pp. 092120-1 - 092120-3.Year
2006ANU Authors
Fields of Research
- Electrical And Electronic Engineering Not Elsewhere Classified
- Materials Engineering Not Elsewhere Classified
