Introduction of atomic hydrogen into Si3N4/SiO2/Si stacks

Citation

Jin, H, Weber, K, Li, W et al 2006, 'Introduction of atomic hydrogen into Si3N4/SiO2/Si stacks', Rare Metals, vol. 25, no. Special Issue, pp. 150-152.

Year

2006

Fields of Research

  • Electrical And Electronic Engineering Not Elsewhere Classified
  • Materials Engineering Not Elsewhere Classified

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