Introduction of atomic hydrogen into Si3N4/SiO2/Si stacks
Citation
Jin, H, Weber, K, Li, W et al. 2006, 'Introduction of atomic hydrogen into Si3N4/SiO2/Si stacks', Rare Metals, vol. 25, no. Special Issue, pp. 150-152.Year
2006Fields of Research
- Electrical And Electronic Engineering Not Elsewhere Classified
- Materials Engineering Not Elsewhere Classified
